Progress in separating and recovering water and organic solvents from photoresist waste stripping solution

Abstract The photoresist waste stripping liquid contains a lot of water and organic solvent, which contain a lot of components with recycling value. The recovery of water and organic solvent from photoresist waste stripping liquid can reduce the pollution to nature and realize resource utilization. In this paper, several common separation methods and devices for recovering water and organic solvent from photoresist waste stripping liquid at home and abroad are reviewed, and the results under different conditions are compared. It is hoped that it can provide reference for the recycling treatment of photoresist waste stripping liquid in China’s electronics industry.

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	Articles by authors
	YU Chenggang
	LI Gangfeng
	FU Ruide
	GUO Yiliang
	WU Hansong
	CONG Haifeng
	LI Xingang
	QU Yajuan

Keywords： photoresist waste stripping liquid water organic solvent separating and recovering

Received 2023-11-08;

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YU Chenggang, LI Gangfeng, FU Ruide, GUO Yiliang, WU Hansong, CONG Haifeng, LI Xingang, QU Yajuan.Progress in separating and recovering water and organic solvents from photoresist waste stripping solution[J] Chemcial Industry and Engineering, 2024,V41(2): 141-147

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