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| 2018, Vol. 35(2): 42-48 DOI: 10.13353/j.issn.1004.9533.20161071 | ||
| Progress in the Technology of High Efficient Removal of Trace Boron and Phosphorus from Trichlorosilane | ||
| Qian Hao, Huang Guoqiang | ||
| School of Chemical Engineering and Technology, Tianjin University, Tianjin 300072, China | ||
| Received 2016-04-18 Revised null | ||
| Supporting info | ||
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