Synthesis of TiO_2 Thin Films Oriented by Self-Assembly Layers

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Abstract The surface of substrate was modified by self-assembled layers of 3-mercaptopropyl trimethoxysilane,which induced the deposition of uniform and integrate nanocrystalline titanium oxide films through the ligand exchange reaction of(NH_4)_2TiF_6 at low temperature.The self-assembled layer of sulfonate groups played an important role in the deposition of titanium oxide on the substrate.When the molar ratio of(NH_4)_2TiF_6/H_3BO_3 is 0.05∶0.1,the as-deposited TiO_2 films were mainly rutile crystallites.When the ratio of(NH_4)_2TiF_6/H_3BO_3 increased to 0.05∶0.15,the as-deposited TiO_2 thin films were mainly anatase crystallites.The deposited films show high light transmittance property.

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Received 2007-07-15; published 2007-07-15

Cite this article:

YANG Hong,LI Wei,ZHANG Jin-li.Synthesis of TiO_2 Thin Films Oriented by Self-Assembly Layers[J] Chemcial Industry and Engineering, 2007,V24(4): 287-290

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