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Chemcial Industry and Engineering 2007, Vol. 24 Issue (1) :86-90    DOI:
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Review on Process for Purifying Nitrogen Trifluoride
PENG Li-pei,WANG Shao-bo,LI Shao-bo,FU Man(The 718 Research Institute of China Shipbuilding Industry Corporation,Handan 056027,Hebei Province,China)
(The 718 Research Institute of China Shipbuilding Industry Corporation,Handan 056027,Hebei Province,China

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Abstract This paper reviews the basic physical and chemical property of nitrogen trifluoride,including its production method.In order to meet the need of semiconductor industry,the applied purification methods for nitrogen trifluoride are:cryogenic distillation,azeotropic distillation,absorption,selective adsorption and the combination of them.
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Received 2007-01-15; published 2007-01-15
Cite this article:   
PENG Li-pei,WANG Shao-bo,LI Shao-bo,FU Man.Review on Process for Purifying Nitrogen Trifluoride[J]  Chemcial Industry and Engineering, 2007,V24(1): 86-90
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