Separation and Multipurpose Utilization of Exhaust in Production of Polycrystalline Silicon by Siemens Process

Abstract The exhaust treatment method in polycrystalline silicon production is addressed in this paper. SiHCl3��HCl and H2 can be recycled after extractive distillation of the by��products. Furthermore��the treatment methods about SiCl4 and SiH2Cl2 are elaborated. Results showed the by��product SiCl4 can be treated by zinc reduction process. Then an attractive process combining the Siemens process with zinc reduction process to produce polycrystalline silicon is obtained. The process has a lot of advantages. The production cost of polycrystalline silicon can be reduced��the by��product SiCl4 can be recycled and the process is closed��circuit circulation. The by��product SiH2Cl2 can be used to produce polycrystalline silicon.��

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	Articles by authors
	SONG Dong-Ming
	XIE Gang
	YU Xiao-Hua
	LI Rong-Xing
	HOU Yan-Qing

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published 2010-11-10

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SONG Dong-Ming, XIE Gang, YU Xiao-Hua, LI Rong-Xing, HOU Yan-Qing.Separation and Multipurpose Utilization of Exhaust in Production of Polycrystalline Silicon by Siemens Process [J] Chemcial Industry and Engineering, 2010,V27(6): 551-555