塔顶全凝器在多晶硅尾气回收技术中的应用

摘要在目前多晶硅生产工艺中，美国CDI尾气回收技术应用非常广泛。但是由于其分离出来的氯化氢气体中混有大量的氢气，且没有设置缓冲储罐来储存氯化氢，对后续工段的生产会造成不利影响。将其塔顶分凝器改为全凝器，降低了氯化氢中氢气的含量，增加了液态氯化氢储罐，缩小了塔的直径，降低了三氯氢硅工段产生的副产物对尾气回收工段的影响，保证了后续工段的正常生产，同时也降低了塔的投资成本。

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	袁学民
	裴艳红
	马国栋

关键词：多晶硅尾气回收全凝器

Abstract： The vent gas recovery technology from CDI is commonly used in the polysilicon production. However, the high concentration of hydrogen mixed in HCl gas has negative impact on trichlorosilane production. In order to reduce the hydrogen concentration in HCl gas, we replace the partial condenser by the total condenser in HCl rectifying tower and add a storage tank. This modification could highly increase the purity and the storage capacity of HCl. In addition, the diameter of rectifying tower, the negative impact brought by byproducts and the cost of TCS production were all reduced.

Keywords： polysilicon vent gas recovery total condenser

Received 2012-04-25;

Corresponding Authors: 裴艳红，电话：18622208105，E-mail：peiyh@cntcc.cn。 Email: peiyh@cntcc.cn

About author: 袁学民(1964-)，男，教授级高级工程师，主要从事化工工程设计。

引用本文:

袁学民, 裴艳红, 马国栋.塔顶全凝器在多晶硅尾气回收技术中的应用[J]. 化学工业与工程, 2013,30(2): 75-78

YUAN Xue-Min, PEI Yan-Hong, MA Guo-Dong.Application of Total Condenser in Polysilicon Vent Gas Recovery[J]. Chemcial Industry and Engineering, 2013,30(2): 75-78