Abstract The vent gas recovery technology from CDI is commonly used in the polysilicon production. However, the high concentration of hydrogen mixed in HCl gas has negative impact on trichlorosilane production. In order to reduce the hydrogen concentration in HCl gas, we replace the partial condenser by the total condenser in HCl rectifying tower and add a storage tank. This modification could highly increase the purity and the storage capacity of HCl. In addition, the diameter of rectifying tower, the negative impact brought by byproducts and the cost of TCS production were all reduced.
YUAN Xue-Min, PEI Yan-Hong, MA Guo-Dong.Application of Total Condenser in Polysilicon Vent Gas Recovery[J] Chemcial Industry and Engineering, 2013,V30(2): 75-78
2013, Vol. 30 
