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Chemcial Industry and Engineering 2011, Vol. 28 Issue (3) :20-24    DOI:
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Hydrogenation Process of Silicontetrachloride on Fixed Bed
ONG Jia1, CAO Zu-bin2, LI Hui-peng2, HAN Dong-yun2, LI Da-wei2
1School of Materials Chemistry, Liaoning University of Petroleum & Chemical Technology; 2 School of Petrochemical Technology, Liaoning University of Petroleum & Chemical Technology

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Abstract Hydrogenation process of silicontetrachloride on fixed bed was investigated, and the effects of temperature, pressure, mole ratio of hydrogen to silicontetrachloride, mass ratio of catalyst to silicon on the conversion were discussed. Compared with fluidized bed, this method can reduce powder blockage and catalyst loss, and bring significant benefit for enterprises. The optimal operating conditions are: temperature of 500 ℃, pressure of 35 MPa, mole ratio of hydrogen to silicontetrachloride 50, mass ratio of catalyst to silicon 0100.
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Keywords： polysilicon   silicontetrachloride(STC)   trichlorosilane(TCS)     
Cite this article:   
ONG Jia1, CAO Zu-bin2, LI Hui-peng2, HAN Dong-yun2, LI Da-wei2.Hydrogenation Process of Silicontetrachloride on Fixed Bed[J]  Chemcial Industry and Engineering, 2011,V28(3): 20-24
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