Abstract:
Nanometer titania inorganic film using polyethylene glycol(PEG) as matrix and tetrabutylorthotitanate as inorganic precursor was successfully prepared. SEM,XRD and XPS were used to characterize the microstructure and crystallite morphology. The nanocrystalline TiO_2 films were integral and crack-free with small pores, whose crystallitic sizes were nanometer and even. The films spinned on sapphire tended to show semiconducting properties at 350 ℃. The p-type TiO_2 thin films have potential for development of a novel gas sensor.
WANG Bao-guo,WANG Su-mei,ZHANG Jin-li,LI Wei~*,LIU Ya-juan Technology,Tianjin University,Tianjin 300072,China).Preparation and Characterization of Nano-Crystalline TiO_2 Sensing Film[J]. Chemcial Industry and Engineering, 2005,22(1): 1-3