[1] | OLIVER F SCHEDLBAUER,HUBERT F WINZIG.Costreduction challenges in CVD chamber cleaning:Strategies toreduce gas costs[J].Future Fab Intl,2002,13(5):22-30. |
[2] | DAVID HARMAN,JOHN FLOOD,ERIC FRENDBERG,etal.Evaluation of C4F8O as an alternative material in CVDchamber cleaning[J].Future Fab Intl,2003,14(3):15-19. |
[3] | BAILEY R F,FISHER R A,HOFFBERG S M.Ergonomicsystems and methods providing intelligent adaptive surfacesand temperature control[P].US:6 230 501,2001-03-15. |
[4] | BAILEY R F,FISHER R A,HOFFBERG S M.Cryotherapysystem for e.g.treating mammalian injuries has heatexchanger for volatilizing refrigerant,sensor for sensingphysiological property of mammal,and control that altersrefrigerant flow rate based on sensor output[P].US:2001 045 104,2001-10-29. |
[5] | KAGAKU GIJUTSU SHINKO JIGYODAN,KOKURITSUGAN CENT SOCHO.Liquid agent for increasing localoxygen concentration,contains perfluorocarbon liquid havingsubstituent for saturating oxygen[P].JP:2 003 342 177,2003-12-03. |
[6] | MEADOWS D L,DAVID LOUIS.Nonaqueous multi or unitdose pharmaceutical composition for delivering drugcomprises a drop instillable suspension of a therapeutic ordiagnostic compound in a nonaqueous perfluorocarbon liquidcarrier[P].US:6 458 376,2002-10-01. |
[7] | BIKSON B,DING Y,NELSON J K.Separation of fastpermeating gas from volatile organic hydrocarbons,involvesusing composite gas separation membrane with selectiveperfluoropolymer layer and porous polyethersulfone support[P].US:2004 000 231,2004-01-01. |
[8] | Mitsui Toatsu Chen Inc(MITK).Organic high molecularmembrane[P].JP:59 213 406,1984-12-03. |
[9] | MAX T ROGERS,JIM G MALIK,JOHN L SPEIRS.Therefractive indices and molar refractions of some halogenfluorides and fluorocarbon derivatives in the vapor state[J].J Am Chem Soc.1956,78(1):46-47 |
[10] | MASAAKI YAMABE,KIYOTAKA ARAI,SHUNICHISAMEJIMA,et al.Process for producing oxygen-containingcyclic fluoro compound[P].US:4 116 977,1978-09-26. |
[11] | SIMONS J H.Electrochemical process of making fluorine-containing carbon compounds[P].US:2 519 983,1950-08-22. |
[12] | EDWARD A KAUCK,ST PAUL,JOSEPH H SIMONS,etal.Cyclic fluoroalkylene oxide compounds[P].US:2 594 272,1952-04-29. |
[13] | Agency of Ind Sci&Technology(AGEN).Cyclic perfluoro-ether compounds production colourless and odourless stableagainst heat and chemicals,useful as inert solvents[P].JP:73 012 742,1973-02-13. |
[14] | Agency of Ind Sci&Technology(AGEN).Perfluoro cyclicethers prepared by electrolytic fluorination of primaryalcohols[P].JP:50 088 062,1975-07-15. |
[15] | LINES D,SUTCLIFFE H.The electrochemical fluorination ofoctanoly fluoride with electrolyte circulation[J].J FluorineChem,1981,17(5):423-439. |
[16] | �պ���,��ï��,������,����.�绯ѧ�������½�չ[J].��ѧ��չ,2004,16(2):213-219. |
[17] | DRESDNER R D,YOUNG A.Pyrolysis of perfluorothioxanetetrafluoride[J].J Org Chem.1958,24(4):566-567 |
[18] | DRESDNER R D.The pyrolysis of trifluoromethyl sulfurpentafluoride and its reaction with perfluoropropylene[J].JAm Chem Soc,1955,77(24):6 633-6 634. |
[19] | DRESDNER R D.A new synthesis of simple fluorocarbontertiary amines[J].J Am Chem Soc.1957,79(1):69-70 |
[20] | HUFHIE R FRICK,ANDERSON W.Perparation ofoctafluorotetrahydrofuran[P].US:3 679 709,1972-07-25. |
[21] | JOHN E LEFFLER,LESLIE J STORY.The decomposition ofaryl iodine diacetates[J].J Am Chem Soc,1967,89(10):2 333-2 338. |
[22] | ALBERT L HENNE,SIDNEY B RICHTER.Perfluorinatedcyclic ethers[J].J Am Chem Soc.1952,74(21):5- |