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化学工业与工程
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��ѧ��ҵ�빤�� 2008, Vol. 25 Issue (1) :87-91    DOI:
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Production of High Purity of Tungsten Hexafluoride
LIU Tong,WANG Shao-bo,LI Ben-dong,LI Shao-bo(The 718 Research Institute of CSIC,Handan 056027,Hebei Province,China)
(The 718 Research Institute of CSIC,Handan 056027,Hebei Province,China
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Abstract�� Tungsten hexafluoride has wide application in electronic industry.In this paper,the method for industrialized production of tungsten hexafluoride at present,quality standard of tungsten hexafluoride and analysis technique of tungsten hexafluoride were introduced,and the promising development of tungsten hexafluoride was summarized.
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Received 2008-01-15; published 2008-01-15
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��ͮ;���ٲ�;���;���ܲ�;.�ߴ��������ٵ�����[J].  ��ѧ��ҵ�빤��, 2008,25(1): 87-91
LIU Tong,WANG Shao-bo,LI Ben-dong,LI Shao-bo.Production of High Purity of Tungsten Hexafluoride[J].  Chemcial Industry and Engineering, 2008,25(1): 87-91
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