Separation and Multipurpose Utilization of Exhaust in Production of Polycrystalline Silicon by Siemens Process
SONG Dong-ming1; 2; XIE Gang1; 3; YU Xiao-hua1; LI Rong-xing1; HOU Yan-qing1
1.Faculty of Metallurgical and energy Engineering; Kunming University of Science and Technology; Kunming 650093; China; 2.Kunming Yeyan New-Material Co.Ltd.; Kunming 650031; 3.Technology Center of Yunnan Metallurgy Group Co.; China
Abstract��
The exhaust treatment method in polycrystalline silicon production is addressed in this paper. SiHCl3��HCl and H2 can be recycled after extractive distillation of the by��products. Furthermore��the treatment methods about SiCl4 and SiH2Cl2 are elaborated. Results showed the by��product SiCl4 can be treated by zinc reduction process. Then an attractive process combining the Siemens process with zinc reduction process to produce polycrystalline silicon is obtained. The process has a lot of advantages. The production cost of polycrystalline silicon can be reduced��the by��product SiCl4 can be recycled and the process is closed��circuit circulation. The by��product SiH2Cl2 can be used to produce polycrystalline silicon.��
SONG Dong-Ming, XIE Gang, YU Xiao-Hua, LI Rong-Xing, HOU Yan-Qing.Separation and Multipurpose Utilization of Exhaust in Production of Polycrystalline Silicon by Siemens Process [J]. Chemcial Industry and Engineering, 2010,27(6): 551-555
2010, Vol. 27 
