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�ؼ���� ˿CVDϵͳ �¶ȳ� ��ױ��¶ȷֲ� ��

Abstract�� Temperature profile in single and multi filament CVD system and temperature distribution in the substrate surface were analysised based on a simplified model and the addition principle respectively.The temperature distribution of the deposition area obtained from them and the growth rate distribution obtained from the growth rate substrate temperature curve conformed to the exprimental results.

Keywords�� hot filament CVD system temperature profile temperature distribution in substrate surface growth rate

Received 1997-01-15;

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��,��ų�,�Ľ�ͯ,��.��˿CVDϵͳ��¶ȳ��ױ��¶ȷֲ�[J]. ��ѧ��ҵ�빤��, 1997,14(1): 43-47

Tang Biyu Jing Jiuchen �� Xia Jintong Cheng Zhongzhang .Temperature Profile in Hot-filament CVD System and Temperature Distribution in Its Substrate Surface[J]. Chemcial Industry and Engineering, 1997,14(1): 43-47