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Abstract�� In this paper,a technical transformation project of a(20 000 t/a) trichlorosilane production capacity plant was introduced in detail,and chemical process simulation software ASPEN was used to simulate and the simulation data were compared with the field data.The comparison results showed that: after the transformation,the boron content in the trichlorosilane and the exhaust emissions in the distillation system have a significant decline,both trichlorosilane purity and yield have an effective improvement.

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Received 2009-11-15; published 2009-11-15

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��Ǿ�;갵��;.�ߴ��辫�Ƽ��[J]. ��ѧ��ҵ�빤��, 2009,26(6): 532-534

YANG Ya-jun,ZANG Dan-wei.Technical Transformation of High-Purity Trichlorosilane Refining Process[J]. Chemcial Industry and Engineering, 2009,26(6): 532-534

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