四氯化硅固定床冷氢化工艺的研究

摘要对四氯化硅固定床加氢工艺进行了研究，考察了反应温度、压力、n(氢气)/n(四氯化硅)、m(催化剂)/m(硅)等因素对四氯化硅转化率的影响。该工艺克服了流化床中粉末状物质会严重堵塞反应装置以及催化剂大量流失的缺点，可以指导生产并为企业带来可观效益。经探讨，最适宜工艺条件为：温度500 ℃；压力35 MPa；n(氢气)/n(四氯化硅)为50；m(催化剂)/m(硅)为0100。

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关键词：多晶硅四氯化硅(STC) 三氯氢硅(TCS)

Abstract： Hydrogenation process of silicontetrachloride on fixed bed was investigated, and the effects of temperature, pressure, mole ratio of hydrogen to silicontetrachloride, mass ratio of catalyst to silicon on the conversion were discussed. Compared with fluidized bed, this method can reduce powder blockage and catalyst loss, and bring significant benefit for enterprises. The optimal operating conditions are: temperature of 500 ℃, pressure of 35 MPa, mole ratio of hydrogen to silicontetrachloride 50, mass ratio of catalyst to silicon 0100.

Keywords： polysilicon silicontetrachloride(STC) trichlorosilane(TCS)

引用本文:

宋佳1, 曹祖宾2, 李会鹏2, 韩冬云2, 李大为2.四氯化硅固定床冷氢化工艺的研究[J]. 化学工业与工程, 2011,28(3): 20-24

ONG Jia1, CAO Zu-bin2, LI Hui-peng2, HAN Dong-yun2, LI Da-wei2.Hydrogenation Process of Silicontetrachloride on Fixed Bed[J]. Chemcial Industry and Engineering, 2011,28(3): 20-24